New Multi-Chamber Wafer Cleaning System Based On Proven Technology Offers Unprecedented Productivity and Operational Flexibility

BEVERLY, Mass., July 9, 2008 (PRIME NEWSWIRE) -- Axcelis Technologies, Inc. (Nasdaq:ACLS) today introduced the new Integra RS photoresist dry strip cleaning system, which brings significantly higher productivity and flexibility to Axcelis' already proven advanced process capabilities. The new system, available immediately, offers the highest manufacturing productivity on the market today for leading-edge memory and logic devices.

The Integra RS's unique multi-chamber design includes paired-chamber process modules that can run production recipes with the highest throughputs available. Each of the chamber pairs can operate independently, giving users the choice of running different cleaning recipes simultaneously or performing maintenance on one module while the others continue to operate. This flexibility makes the system ideal for a variety of advanced cleaning applications in a high volume manufacturing environment. The platform also includes technology required to address cleaning challenges in future technology nodes, such as those associated with advanced lithography and high-k/metal-gate adoption.

"Advanced memory and logic chipmakers will appreciate the industry-leading productivity and remarkable versatility of the Integra RS system," said Bill Bintz, senior vice president of marketing for Axcelis. "The ability to use fewer, more flexible cleaning tools saves valuable fab floor space and reduces total cost of ownership for our valued customers."

Axcelis will ship two Integra RS systems in the third quarter. The first system is being sent to Europe to support a 32/22nm collaborative research program. The second system is being shipped to an existing memory manufacturing customer.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation and cleaning systems. Axcelis also licenses its 50% owned joint venture, SEN Corporation, an SHI and Axcelis Company, to manufacture and sell certain implant products in Japan. The company's Internet address is: www.axcelis.com.

CONTACT:  Axcelis Technologies, Inc.
          David Snyder
            +1 (978) 787 4273
            Fax: +1 (978) 787 4275
            david.snyder@axcelis.com
          Investor Contact: 
          Stephen Bassett 
            +1 (978) 787 4000
            Fax: +1 (978) 787 9133
            investor.relations@axcelis.com
          Loomis Group
          Heather Smith
          +1 (617) 309 8005
          Fax: +1 (617) 638 0033
          smithh@loomisgroup.com